FBAR SENSORS

FOR INDOOR AIR QUALITY MONITORING

Indoor air quality is affected by the chemicals all around us – in soft furnishings, toiletries and cleaning materials, and produced by our wood-burning stoves and gas cookers. Yet despite their link with a range of diseases from asthma to cancer, we can’t see or smell toxic particulates and volatile organic compounds. That’s why we’ve created a sensor to act as your eyes, ears and nose – and detect any dangerous build-up before it reaches harmful levels.

Our novel sensor is based on film bulk acoustic resonator (FBAR) technology. It is extremely small – as thin as a human hair – and has high mass sensitivity, down to femtograms. This makes it more accurate and responsive than existing sensors so it can detect even a trace of harmful compounds in the sub-PM2.5 range.

DUAL MODE

Simultaneous measurement of mass attachment and temperature

MASS SENSITIVITY

Capable of measuring mass down to the femtogram range

TEMPERATURE SENSITIVITY

Simultaneous measurement of mass attachment and temperature

FOUNDRY FABRICATION

Fabrication can be made on silicon wafers using standard foundry processes at low cost

REDUCED SIZE

Devices with a sensing area of ∼ 100 µm x 100 µm that can be fabricated as an array of 20 sensors in a 4 mm x 4 mm silicon die

LOW POWER

Very low power consumption ∼ µW

NEWS

Cambridge tech leader joins Sorex Sensors

Martin Frost appointed to the board of innovative sensor technology spin-out 17 November, 2020 – University of Cambridge sensor technology spin-out Sorex Sensors has...

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Sorex Sensors completes £900,000 funding round

Co-founder moves to CEO role at innovative sensor technology spin-out 25 August, 2020 – University of Cambridge spin-out Sorex Sensors has raised £900,000 to...

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Sorex launches first FBAR sensor with development kit

First product from innovative sensor technology spin-out Sorex Sensors 15 October, 2019 – University of Cambridge spin-out Sorex Sensors has today launched its first...

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